microworks - LIGA technology

Photographs by Felix Schiebel

The company

microworks GmbH was founded in 2007 as a spin-off from the Institute of Microstructure Technology (IMT) at the Karlsuhe Institute of Technology (KIT) in Germany. microworks stands for high precision at the crossroads of micro and nano technology. Our core competence is X-ray lithography which allows the highest aspect ratios and a precision well below 1µm within a wafer and from wafer to wafer.

We control the entire chain of production, from layout and mask making to UV and X-ray lithography up to electroplating and surface finishing. Attention to detail, exacting standards: We are dedicated to high-precision microfabrication.


Our mission

To serve our clients as the number-one supplier of high-precision microstructures made with X-ray and laser LIGA technology. Our microstructures are key to tomorrow’s complex and highly reliable microsystems.