Breakthrough in LIGA x-ray mask technology
High-precision, tall structural heights combined with small lateral dimensions have been the hallmark of x-ray LIGA technology for many years. In a joint effort, microworks and KIT have now developed a new kind of x-ray mask with a significantly greater layout area than was ever possible in conventional sputtered titanium masks. According to Joachim Schulz, managing director of microworks, this breakthrough has three important implications for customers: “We can make individual parts considerably cheaper, we can make parts larger, which is particularly significant for x-ray grating fabrication, and the patterned area is now broad enough to accommodate 6-inch MEMS technology lines.”
