Microworks - Precision Structures

Thomas Duttenhofer uses HZB-BESSY’s booking system to get access to one of the machines (left) and inspects microworks’ first LIGA-substrate processed at HZB-BESSY (right).

Helmholtzzentrum Berlin and Microworks Sign Contract to Use BESSY Synchrotron as Second Source

On April 27, 2011, microworks and HZB signed a contract that grants microworks access to BESSY’s LIGA beamlines. “We now have a second source for x-ray lithography, and it was wonderful how warmly we were welcomed by the BESSY staff,” says Dr. Joachim Schulz, managing director of microworks. Sole dependence on one synchrotron had been a major hurdle for industrial LIGA production. Because BESSY’s beam characteristics and technical equipment are quite similar to ANKA’s, microworks can now work independently of ANKA’s operating schedules and shut-down periods.