Dedicated to high-precision microfabrication
Attention to detail: exacting standards with respect to measurement and fabrication schemes.
Fabrication services
microworks fabricates microstructures from Ni, NiCo, Au and hardened Au in cooperation with IMT/KIT. Smallest details under 1µm; heights between 100 and 2000µm. We use IMT's LIGA beamlines at the ANKA synchrotron as well as the LIGA beamlines at the BESSY synchrotron for pattern generation. For a detailed description of our products click here.
Metrology services
Highly repeatable sub-µm metrology with an optic-tactile system based on the Werth fiber probe; identifying variations in parts from different fabrication schemes on the order of 1µm, fabrication tolerances over extended periods of time (<0.5µm) and dimensional tolerances of individual parts. -> click here for more details