Micro gears
Micro gears and micro mechanical structures have been produced by LIGA and UV-LIGA technology since the early 1990s. The tall heights made by X-ray LIGA at very small lateral dimensions allow the transmitted torque values to stay reasonably high. The very small runout over the whole pattern height allows our customers to make transmission trains with virtually no backlash. One drawback: The base for mechanical applications is limited to a very few materials, including Ni, NiP, NiFe and NiCo.