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Optical applications

X-ray LIGA’s high precision can be utilized in several ways for optical applications, including the creation of polarization and interference effects as well as precision holes and precision slits for optical paths.

 

Light path within a LIGA spectrometer. (Photo courtesy of Arndt Last, KIT)
A 10µm-diameter disc carries a 8µm- period polarization grid that is only 1.5µm thin.
Careful handling of infrared filters. Smallest dimension: 0.4µm; gold height: 4µm.